ASTM F576-01 PDF
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
Название (английский):
ASTM F576-01
Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 16 августа 2017 г.
- SKU:
- ASTM F576-01
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Язык документа:
Срок поставки:1 раб. дн. (перевод)
Цена:15 €
Abstract
ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers the measurement by ellipsometry of the thickness and refractive index of an insulator grown or deposited on a silicon substrate.1.2 This test meth...
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