ASTM STP37022S PDF
Multithreshold HF/DF Pulsed Laser Damage Measurements on Evaporated and Sputtered Silicon Films
Название (английский):
ASTM STP37022S
Multithreshold HF/DF Pulsed Laser Damage Measurements on Evaporated and Sputtered Silicon Films
- Статус документа:
- D
- Формат:
- Электронный (PDF)
- SKU:
- ASTM STP37022S
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Abstract
Previously, we reported a comparison of damage resistance of various coating materials deposited by vacuum evaporation and measured at 2.7 and 3.8 μm. It was found that Si films fail by a thermal process and, in agreement with other studie...
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