BS EN 62047-1:2016 PDF
Semiconductor devices. Micro-electromechanical devices - Terms and definitions
Semiconductor devices. Micro-electromechanical devices - Terms and definitions
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 30 апреля 2016 г.
- ICS:
- 31.080.99
- Технический комитет:
- CENELEC
- SKU:
- BS EN 62047-1:2016
Abstract
What is BS EN 62047-1 - T erms and definitions for Micro-electromechanical devices (MEMS ) ?
BS EN 62047-1 is the first part of an international standard covering terms and definitions that enables standardization of terms, definitions and language related to micro-electromechanical devices. BS EN 62047-1 defines terms for micro-electromechanical devices including the process of production of such devices.
Who is BS EN 62047-1 - Terms and definitions for Micro-electromechanical devices ( MEMS) ?
BS EN 62047-1 on semiconductor devices useful for:
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