BS EN 62047-11:2013 PDF
Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Semiconductor devices. Micro-electromechanical devices - Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 октября 2013 г.
- ICS:
- 31.080.99
- Технический комитет:
- CENELEC
- SKU:
- BS EN 62047-11:2013
Abstract
What is BS EN 62047-11 - Linear thermal expansion of free-standing materials used in micro-electromechanical systems about?
BS EN 62047-11 is the 11th part of an international standard used for Semiconductor devices. BS EN 62047-11 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) microelectromechanical system (MEMS) materials with the length between 0,1 mm and 1 mm and width between 10 μm and 1 mm and thickness between 0,1 μm and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material’s melting temperature.
Who is BS EN 62047-11 - Linear thermal expansion of free-stand...
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