BS EN 62047-2:2006 PDF

What is BS EN 62047-2 — Micro-electromechanical devices about?

BS EN 62047-2 is the second part of the multi-series standard that focuses on aspects of semiconductor devices. BS EN 62047-2 specifies the tensile testing method of thin-film materials used in micro-electromechanical devices. It gives method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 mm, which are the main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices. The main structural materials for MEMS, micromachines and similar devices have specific features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching and photolithography.