BS EN 62047-4:2010 PDF

What is BS EN 62047-4 - Specification for Micro-electromechanical devices (MEMS) about?

BS EN 62047-4 is the fourth part of the multi-series used for  Semiconductor devices. BS EN 62047-4 describes generic specifications for micro-electromechanical systems   (MEMS) made by semiconductors, which are the basis for specifications given in other parts   of this series for various types of MEMS applications such as sensors, RF MEMS, excluding   optical MEMS, bio MEMS, micro T...