BS EN ISO 14644-14:2016 PDF

1   Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment , process equipment , components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO 14644:

— assessment of suitability with respect to biocontamination;

— testing for suitability of decontamination agents and techniques;

— cleanability of equipment and materials;

— requirements on design of equipment and selection of materials;

— physical properties of materials (e.g. electrostatic, thermal properties);

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