Name: ASTM F1389-00 — Standard Test Methods for Photoluminescence Analysis of Single Crystal Silicon for III-V Impurities (Withdrawn 2003)
SKU: ASTM F1389-00

ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 These test methods cover the simultaneous determination of electrically active boron, phosphorus, arsenic, and aluminum content in low-dislocation mono-crystalline silico...

ASTM F1389-00

Abstract

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