ASTM F2139-01
Standard Test Method for Measuring Nitrogen Concentration in Silicon Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)
Standard Test Method for Measuring Nitrogen Concentration in Silicon Substrates by Secondary Ion Mass Spectrometry (Withdrawn 2003)
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 16 августа 2017 г.
- SKU:
- ASTM F2139-01
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Abstract
ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers the determination of total nitrogen concentration in the bulk of single crystal substrates using secondary ion mass spectrometry (SIMS) (1,2).1.2 ...
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