Name: ASTM F672-01 — Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)
SKU: ASTM F672-01

ASTM F672-01

Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)

Название (английский):

ASTM F672-01

Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)

Статус документа:: Отменён
Формат:: Электронный (PDF)
Дата публикации:: 16 августа 2017 г.
SKU:: ASTM F672-01

ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type. Note 1--This test method may...

ASTM F672-01

ASTM F672-01

Abstract

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