BS EN ISO 14644-15:2026 - TC
Cleanrooms and associated controlled environments - Assessment of suitability for use of equipment and materials by airborne chemical concentration
Cleanrooms and associated controlled environments - Assessment of suitability for use of equipment and materials by airborne chemical concentration
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 мая 2026 г.
- ICS:
- 13.040.35
- Технический комитет:
- CEN
- SKU:
- BS EN ISO 14644-15:2026 - TC
Abstract
1 Scope This document specifies requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments that are linked to the ISO standard for air cleanliness by chemical concentration (see ISO 14644‑8 ). This document does not apply to the following:
health and safety requirements;
compatibility with cleaning agents and techniques;
cleanability;
biocontamination;
specific requirements of equipment and materials for processes and products;
design details of equipment.
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