BS IEC 62047-32:2019
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators
Semiconductor devices. Micro-electromechanical devices - Test method for the nonlinear vibration of MEMS resonators
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 января 2019 г.
- ICS:
- 31.080.99
- Технический комитет:
- CENELEC
- SKU:
- BS IEC 62047-32:2019
Abstract
What is BS IEC 62047 ‑ 32 - MEMS resonator testing about?
MEMS resonators are small electromechanical structures that vibrate at high frequencies. They are used for timing references, signal filtering, mass sensing, biological sensing, motion sensing, and other diverse applications.
BS IEC 62047 ‑ 32 is part of the IEC 62047 series on semiconductor devices. BS IEC 62047 ‑ 32 <span data-contrast="...
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