BS ISO 14606:2015
Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials
Surface chemical analysis. Sputter depth profiling. Optimization using layered systems as reference materials
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 31 декабря 2015 г.
- ICS:
- 71.040.40
- SKU:
- BS ISO 14606:2015
Abstract
What is ISO 14606 - Sputter-depth profiling parameters about?
ISO 14606 discusses surface chemical analysis. The specific applications of ISO 14606 are as follows:
Single-layered and multilayered systems on a substrate as reference materials are useful for the optimization of depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry
Systems...
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