ISO 11039:2012

Overview - ISO 11039:2012 (SPM drift rate)

ISO 11039:2012 specifies how to measure and report drift rates of scanning‑probe microscopy (SPM) instruments in the X, Y (lateral) directions and, for topographic SPMs, the Z (vertical) direction. The standard defines terms (drift, drift rate, average and maximum drift rate, settling time) and gives practical, image‑based measurement methods so manufacturers and users can quote and evaluate drift figures consistently. Measurements are intended for characterization and experiment design - not for image correction.

Key topics and technical requirements

• Drift metrics: Average and maximum drift rates (X, Y, Z or vector magnitude); short‑term behaviour after a user‑defined settling time and longer‑term behaviour can both be characterized.
• Measurement methods: Three normative, image‑based procedures:
  • Image correlation method (Annex A)
  • Characteristic‑marker method (Annex B)
  • Non‑periodic grating (NPG) method (Annex C)
• Procedure essentials: Initial checks, basic characterization to determine settling time, and further characterization under different operating conditions (Clause 6).
• Instrument requirements: Capability to record digital SPM images and maintain dimensional calibration throughout testing.
• Environmental recommendations: Controlled conditions - temperature stability within ±1 °C, relative humidity preferably < 50 %, low electromagnetic interference, ambient vibration and noise minimized.
• Practical parameters: Suggested settling times commonly 5–60 minutes; example initial field of view ~5 μm for exploratory studies.
• Reporting: Measurement report content and guidance (Clause 7 and Annexes D–F) including instrumental parameters that affect drift and examples of results.

Practical applications and who uses it

• Manufacturers - to quote meaningful, comparable drift figures in product specifications and support claims about instrument stability (AFM, SPM).
• Metrology and calibration labs - to evaluate instrument performance and certify drift behaviour.
• Researchers in nanotechnology and surface science - to design experiments (time series imaging, nanoscale property mapping, manipulation/assembly) that remain within the usable field of view.
• Instrument operators (AFM/STM users) - to characterize lab‑specific drift under real operating conditions and select appropriate settling times and operating modes.
• Quality assurance teams - for acceptance testing and benchmarking of SPM systems.

Related standards

• ISO 18115-2: vocabulary and terms used in scanning‑probe microscopy (normative reference in ISO 11039:2012).
• Prepared by ISO/TC 201 (Surface chemical analysis), SC 9 (Scanning probe microscopy).

Keywords: ISO 11039:2012, scanning‑probe microscopy, SPM drift rate, AFM drift, drift measurement, surface chemical analysis, image correlation, non‑periodic grating.