ISO 16242:2011

Overview

ISO 16242:2011 - Surface chemical analysis - Recording and reporting data in Auger electron spectroscopy (AES) defines the minimum information that must be recorded and reported after analysing a test specimen by Auger electron spectroscopy. The standard ensures AES data are traceable, repeatable and interpretable by specifying what belongs in the analyst’s record, how spectra and quantitative results should be documented, and what metadata must accompany depth profiles, maps/linescans and chemical‑state analyses.

Key topics and technical requirements

ISO 16242:2011 covers six main areas of recording and reporting:

• Analyst’s record: specimen ID, unique specimen number, pre/post‑analysis description, date, analyst identity, full details of ex situ/in situ specimen preparation and mounting so analyses can be repeated.
• Analytical conditions: instrument identification, primary electron energy and incidence angle, beam current, detector type, analyser resolution, pass energy/slits, take‑off angle, chamber pressure, beam diameter/scan area, energy scan range, data points, acquisition time and modulation.
• Spectra: clear axis labels (kinetic energy, intensity), peak/region labels (e.g. Cu KLL), energy tic marks, intensity units (counts/s or dC/dE), and full disclosure of data‑processing (differentiation, smoothing, transmission correction, spike removal).
• Quantitative analysis: declared quantification model (homogeneous, layered, contamination layer), intensity metric (peak area, peak height), background fitting, transmission function and sensitivity factors (source), corrections (dead time, matrix effects), applied data‑processing and error estimates.
• Compositional depth profiles: presentation (montage or quantified profile), sputter‑rate calibration method/material, ion beam energy/current, sputtered area and depth/time axis labelling.
• Maps and linescans: mapped peak identity and energy, background removal, field‑of‑view and calibration in X/Y, and mapped property (atomic % or scale).

Additional requirements: calibration of the kinetic‑energy scale in accordance with ISO 17973 or ISO 17974 (or documented manufacturer procedure), and recording of chemical‑state analysis parameters (scan width, eV/channel, FWHM, reference materials, peak‑synthesis method).

Applications and who uses it

ISO 16242 is essential for:

• Surface analysis laboratories ensuring traceable AES reporting.
• Quality managers, R&D teams and materials scientists validating surface composition, coatings, contamination and interfaces.
• Semiconductor, thin‑film, corrosion and failure analysis specialists performing depth profiling, mapping and chemical‑state interpretation.
• Instrument vendors and service providers preparing customer reports and data exports.

Benefits: improves data reproducibility, supports auditability, and enables meaningful comparison of AES results across labs and instruments.

Related standards

• ISO 17973, ISO 17974 (AES energy calibration)
• ISO 18115‑1 (vocabulary)
• ISO 20903 (peak intensity/reporting)
• ISO/TR 18394, ISO/TR 15969 (chemical‑state and sputter depth guidance)
• ISO 18116, ISO 18117 (sample preparation/handling)