ISO 17297:2025

Overview

ISO 17297:2025 - "Microbeam analysis - Focused ion beam application for TEM specimen preparation - Vocabulary" is an international vocabulary standard that defines the most commonly used terms for preparing transmission electron microscopy (TEM) specimens using focused ion beam (FIB) techniques. Published by ISO and prepared by ISO/TC 202/SC 01, the document standardizes terminology across FIB, FIB‑SEM and TEM specimen‑preparation workflows to reduce miscommunication and support consistent reporting and training.

Key topics and requirements

• Scope and intent: Provides standardized definitions for terms used in FIB‑based TEM specimen preparation. Scope covers physical basis of FIB systems, FIB instrumentation, TEM sample preparation by FIB, and terms related to scanning ion and electron microscopy using dual‑beam FIB‑SEM systems.
• Structure: Organized into sections that include:
  • Terms related to the physical basis (e.g., altered layer, collision cascade, sputtering, amorphization)
  • Instrumentation terms (e.g., beam current, beam diameter, angle of incidence, ion species)
  • TEM sample‑preparation terminology (site‑specific lift‑out, thinning, curtaining)
  • Terms for scanning ion/electron microscopy on FIB‑SEM platforms
• Normative aspects: This is a vocabulary/terminology standard; there are no normative references and it does not prescribe process parameters or performance metrics. Its “requirements” are editorial: consistent use of defined terms in technical documents, reports, and training.
• Cross‑references: Several entries cite existing ISO references (for example ISO 18115‑1:2023 and ISO 21466:2019) for source alignment.

Applications

• Standardizes language in documentation, laboratory reports, method descriptions, and publications involving FIB and TEM specimen preparation.
• Facilitates clear communication in:
  • Failure analysis and root‑cause investigations
  • Materials characterization across semiconductors, metals, polymers, composites, glass and biological samples
  • Development and validation of TEM sample‑prep procedures (site‑specific lift‑out, final thinning, cryogenic prep)
  • Instrumentation specs and vendor documentation for FIB‑SEM systems

Who should use this standard

• FIB operators and TEM microscopists
• Materials scientists and failure‑analysis engineers
• Instrument manufacturers and software developers
• Standards committees, educators and technical authors producing protocols, training materials or regulatory submissions

Related standards

• ISO 18115‑1:2023 (referenced as source for several definitions)
• ISO 21466:2019 (cited for inelastic mean free path terminology)
• ISO/IEC Directives (editorial rules referenced in foreword)

Using ISO 17297:2025 helps ensure consistent, searchable, and SEO‑friendly documentation and communication for focused ion beam applications in TEM specimen preparation.