ISO 19606:2017

Overview

ISO 19606:2017 specifies a test method to evaluate the adequacy of AFM probe tips for measuring surface roughness of fine-ceramic (advanced/technical ceramic) thin films. The standard targets measurements where the arithmetical mean roughness Ra is about 1 nm to 30 nm and the mean width of roughness profile elements RSm is about 0.04 µm to 2.5 µm. Its primary purpose is to ensure reliable, reproducible AFM surface roughness results in production and quality‑assurance environments by providing a method to evaluate probe‑tip diameter (curvature) and related measurement error.

Key Topics and Requirements

• Probe‑tip diameter definition: Probe‑tip diameter D is defined at a distance of 10 nm from the tip end.
• Probe‑tip evaluation standard plate: A spike matrix plate is used to assess tip geometry. Typical plate features include: tip curvature radius ~10 nm, aperture angles 20° or 50°, tip height 300–600 nm, nearest‑neighbour spacing 2.12 µm, plate size 5 mm × 5 mm.
• Test environment: Measurements should be made under stable conditions (recommended temperature 18–25 °C, humidity ≤70%, low acoustic noise ≤60 dB and minimal mechanical vibration - see the standard for exact vibration criteria).
• AFM hardware: Dynamic‑mode cantilevers dedicated for the method with resonant frequency >100 kHz; scanner capable of >10 µm × 10 µm XY scan area; specimen stage supporting centred scanning.
• Calibration: X‑Y and Z axes must be calibrated using a certified grating/step standard (recommended grating pitch <2 µm and step height <20 nm) to obtain axis calibration factors when needed.
• Probe‑tip error evaluation: The standard defines a probe‑tip evaluation sequence using preliminary Ra and RSm from short AFM line scans (e.g., 256 or 512 pixels in X; scan speeds 0.5–1 Hz; 2 µm and 10 µm line scans) and a template relating probe diameter, preliminary Ra and RSm to expected measurement error.

Applications and Users

• Quality control and production monitoring of fine ceramic thin films (e.g., coatings, electronic ceramic layers) where nanometer‑scale roughness matters.
• AFM metrology laboratories and instrument manufacturers validating probe tips and measurement procedures.
• Materials scientists, process engineers, and QA teams requiring standardized AFM roughness data for acceptance testing, process control, or supplier qualification.
• Probe manufacturers and calibration service providers developing traceable evaluation methods.

Related Standards

Normative references include ISO 4287, ISO 4288 (profile surface texture methods), ISO 11039 and ISO 11952 (SPM calibration and drift), ISO 18115‑2 (SPM terminology) and ISO 25178‑2 (areal surface texture terms).

Keywords: ISO 19606:2017, atomic force microscopy, AFM surface roughness, fine ceramics, probe‑tip evaluation, Ra, RSm, AFM calibration, thin‑film roughness.