ISO 19606:2024

Overview

ISO 19606:2024 - Fine ceramics (advanced ceramics) - Test method for surface roughness of fine ceramic films by atomic force microscopy (AFM) - specifies a standardized method to evaluate the adequateness of AFM probe tips for measuring surface roughness of fine-ceramic thin films. The method targets surfaces with an arithmetical mean roughness Ra ≈ 1 nm to 30 nm and a mean width of roughness profile elements Rsm ≈ 0.04 µm to 2.5 µm. The standard focuses on probe‑tip diameter/curvature evaluation and how probe geometry affects AFM roughness metrology for production and quality‑assurance environments.

Key topics and technical requirements

• Probe‑tip evaluation: Procedures to determine probe‑tip diameter (defined at 10 nm from the tip end) and to quantify probe‑tip error affecting Ra measurements.
• Probe‑tip diameter evaluation standard plate: Specification of a spike matrix plate used to characterize tips - typical features include tip curvature radius ≈ 10 nm; aperture angles 20° or 50°; tip height 300–600 nm; nearest‑neighbor spacing ≈ 2.12 µm; plate size 5 mm × 5 mm.
• AFM system and probe requirements: Uses a dynamic‑mode cantilever (commercially available) with resonant frequency > 100 kHz and a scanner capable of ≥10 µm × 10 µm XY scan area.
• Calibration: Guidance to calibrate X, Y and Z scan axes using certified calibration standards (recommended grating pitch < 2 µm and step height < 20 nm) and to perform traceable calibration of the AFM system.
• Environment: Measurements should be made in a low‑disturbance environment (stable temperature, controlled humidity, low acoustic and mechanical vibration - see the standard for specified limits).
• Profile processing: Roughness profiles are derived using low‑pass filtering per ISO 16610‑21 and sampling/cut‑off guidance as referenced in ISO 21920 series.

Applications and who should use it

• Quality control and assurance for fine‑ceramic thin films in manufacturing (semiconductor, sensors, optical coatings, MEMS).
• Materials scientists and research laboratories performing AFM roughness metrology at the nanometre scale.
• Metrology and calibration labs that certify AFM systems or probe tips.
• AFM instrument and probe manufacturers who need standard methods to validate tip geometry and measurement reproducibility.
  Practical benefits include improved reproducibility of Ra measurements, better process control on production lines, and defensible metrology in supplier/customer quality agreements.

Related standards

ISO 19606:2024 references and aligns with AFM and surface‑texture standards such as:

• ISO 21920‑1 / ‑2 / ‑3 (surface texture: profile)
• ISO 25178‑2 (areal surface texture terms)
• ISO 11039, ISO 11952, ISO 18115‑2 (SPM terminology, calibration, drift) For implementation, consult these normative references and the full ISO 19606:2024 text for procedural details and reporting requirements.