ISO 19685:2017
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 13
- Дата публикации:
- 20 сентября 2017 г.
- Издание:
- ISO IS 19685 edition 1 version 1
- ICS:
- 23.160
ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.
Abstract
Overview - ISO 19685:2017 (Pirani gauges, calibration & uncertainties)
ISO 19685:2017 is an international standard for Pirani vacuum gauges used in vacuum technology. It defines the parameters, calibration procedures and the measurement uncertainties to be considered when operating Pirani gauges over the pressure range 0.01 Pa to 150 kPa. The standard complements general vacuum‑gauge guidance (ISO 3567 and ISO 27893) and provides additional procedures to characterize response time and hysteresis of Pirani gauges.
Key topics and technical requirements
-
Scope and definitions
- Applies to thermal‑conductivity type Pirani gauges (including convection‑enhanced variants noted in the standard).
- Defines physical parameters such as internal volume, thermal accommodation coefficient, long‑term instability, response time (τ) and hysteresis.
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Specifications for gauge design and operation
- Expected measurement range, full scale and output types (pressure, voltage or current).
- Requirements for materials exposed to gas, connecting flange, interface/pin‑connections, warm‑up period, compatibility between gauge tube and controller, normal operating conditions, power supply, cable length, maximum bake‑out temperature, mounting orientation and dimensions.
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Optional (additional) specifications
- Long‑term instability, relative sensitivity factor, hysteresis, response time, inspection record, configuration, weight, storage/transport conditions, photographs, maximum power consumption and set points.
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Calibration and measurement procedures
- Conditions for calibration, assembly/adjustments of the calibration item, direct‑comparison calibration procedures, uncertainty evaluation during calibration, and content required in a calibration certificate.
- Specific measurement procedures for determining hysteresis and response time.
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Measurement uncertainty
Practical applications and who uses ISO 19685:2017
-
Who benefits
- Calibration laboratories and metrology institutes performing traceable calibrations.
- Manufacturers of Pirani gauges and vacuum gauge controllers.
- Engineers and technicians responsible for vacuum systems in research labs and industrial vacuum processing.
- Quality managers ensuring instrument performance and traceability.
-
Practical uses
- Establishing traceable calibration procedures for Pirani gauges.
- Characterizing gauge dynamic behavior (response time, hysteresis) for process control.
- Defining uncertainty budgets when Pirani gauges are used as reference or process monitors.
- Ensuring compatibility and safe operating conditions (bake‑out, power, mounting) for reliable vacuum measurement.
Related standards
- ISO 3567 - Vacuum gauges: calibration by direct comparison with a reference gauge
- ISO 27893 - Evaluation of uncertainties for calibrations by direct comparison
- ISO/IEC 17025 - General requirements for competence of testing and calibration laboratories
Keywords: ISO 19685:2017, Pirani gauge, vacuum gauges, calibration, measurement uncertainties, vacuum technology, response time, hysteresis, thermal conductivity gauge, pressure range.
Технические детали
- Технический комитет
- ISO/TC 112 - Vacuum technology
- SKU
- ISO 19685:2017
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