ISO 3529-3:2014

Overview

ISO 3529-3:2014 is an International Standard that defines the vocabulary for total and partial pressure vacuum gauges. It is part of the ISO 3529 series on vacuum technology vocabulary and continues the terminology work started in ISO 3529‑1 (general vacuum terms) and ISO 3529‑2 (vacuum pumps and related terms). The standard provides clear, internationally harmonized definitions for gauge types, components and measurement characteristics used across vacuum measurement and vacuum technology applications.

Key topics and technical definitions

ISO 3529-3 organizes terminology and key technical concepts, including:

• General gauge components
  • gauge head, nude gauge, gauge control unit, gauge indicating unit
• Categories of vacuum gauges
  • differential, absolute, total pressure and partial pressure (partial pressure analyzer) gauges
• Measurement characteristics and performance terms
  • measurement range, sensitivity (and sensitivity coefficient), relative sensitivity factor, ionization sensitivity, equivalent nitrogen pressure, X‑ray limit
• Total pressure gauge types (defined by physical principle)
  • Mechanical: liquid level manometer, elastic element gauges (Bourdon, diaphragm, capacitance diaphragm), compression gauges (e.g., McLeod), piston/pressure balance
  • Transport phenomena: viscosity gauges (spinning rotor), thermal conductivity gauges (Pirani, thermocouple, thermistor), thermo‑molecular gauges
  • Ionization-based: ionization vacuum gauge, crossed field ionization gauges (Penning, magnetron), emitting cathode ionization gauges (hot cathode, triode, Bayard‑Alpert)
• Partial pressure measurement concepts
  • Definitions related to ion currents from ionized gas constituents and proportionality differences between gas species

Practical applications and who uses this standard

ISO 3529-3 is valuable for professionals who need consistent terminology and accurate communication about vacuum measurement:

• Vacuum system designers and engineers
• Manufacturers of vacuum gauges and instrumentation
• Calibration and metrology laboratories
• Research laboratories using high- and ultra-high‑vacuum systems
• Quality and compliance teams preparing technical documentation, procurement specs, and test methods
• Standards committees and technical authors referencing vacuum measurement vocabulary

Using ISO 3529-3 helps reduce ambiguity in specifications, product datasheets, calibration reports and technical publications involving vacuum gauges, Pirani, ionization gauges, capacitance diaphragm gauges, and other measurement methods.

Related standards

• ISO 3529‑1 - General terms used in vacuum technology
• ISO 3529‑2 - Definitions of vacuum pumps and related terms
  (ISO 3529-3 is part of the ISO 3529 vocabulary series maintained by ISO/TC 112, Vacuum technology.)

Keywords: ISO 3529-3, vacuum gauges, vacuum technology vocabulary, total pressure, partial pressure, Pirani gauge, ionization gauge, capacitance diaphragm gauge, spinning rotor, Penning gauge.