ASTM F1811-97(2002)
Standard Practice for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data (Withdrawn 2003)
Standard Practice for Estimating the Power Spectral Density Function and Related Finish Parameters from Surface Profile Data (Withdrawn 2003)
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 16 августа 2017 г.
- SKU:
- ASTM F1811-97(2002)
Abstract
ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This practice defines the methodology for calculating a set of commonly used statistical parameters and functions of surface roughness from a set of measured surface prof...
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