ASTM F613-93
Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001)
Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001)
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 2 марта 2021 г.
- SKU:
- ASTM F613-93
Abstract
Scope1.1 This test method covers measurement of the diameter of silicon wafers up to 205 mm in diameter. Other semiconductor materials with a circular shape can also be measured. 1.2 This test method is independent of surface finish and may...
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