ASTM F672-01
Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)
Standard Test Method for Measuring Resistivity Profiles Perpendicular to the Surface of a Silicon Wafer Using a Spreading Resistance Probe (Withdrawn 2003)
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Дата публикации:
- 16 августа 2017 г.
- SKU:
- ASTM F672-01
Abstract
ScopeThis standard was transferred to SEMI (www.semi.org) May 20031.1 This test method covers measurement of the resistivity profile perpendicular to the surface of a silicon wafer of known orientation and type. Note 1--This test method may...
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