IEC/IEEE 62659:2015

Overview

IEC/IEEE 62659:2015 - Nanomanufacturing: Large scale manufacturing for nanoelectronics provides a practical framework for safely and reliably introducing nanomaterials (for example, carbon nanotubes, graphene, quantum dots) into high-volume semiconductor manufacturing. The standard addresses the structured, methodical steps required to incorporate nanoscale materials and processes while protecting the strict contamination and yield requirements of modern fabs.

Key topics and requirements

• Scope and purpose: Framework to integrate nanoelectronics into existing large-scale fabrication environments with minimal yield risk.
• Supply‑chain stages covered: Raw materials acquisition, materials processing, device design, IC fabrication, test/qualification, and end‑use.
• Nanomaterial characterization: Guidance on describing materials by composition, density, purity, size/dimensions, electrical properties, delivery medium, surface functionalization, particle size distribution, surface area, shape, and aggregation.
• Manufacturing process types: Distinguishes bottom‑up, top‑down, and hybrid nanomanufacturing approaches and their relationship across length scales.
• Contamination and yield control: Emphasizes that nanomaterials can act as contaminants in fabs; introduces practices and sequencing to manage introduction without compromising yields.
• Safety and environmental considerations: Identifies the need to address potential health, safety and environmental risks when scaling nanomaterials in production.
• Definitions and terminology: Aligns with nanoscale/ nanotechnology terms (e.g., nanoscale, nano‑object, nanostructure) to ensure consistent communication across suppliers and fabs.

Applications and who uses this standard

IEC/IEEE 62659 is intended for stakeholders involved in scaling nanoelectronics from lab to fab-level production:

• Semiconductor foundries and fabrication process engineers - to plan and qualify nanomaterials in high-volume lines while protecting yield.
• Device and IC designers - to understand manufacturability constraints when specifying nanoscale materials or structures.
• Nanomaterial suppliers and OEMs - to provide consistent characterization and delivery media required by fabs.
• Quality, safety and environmental managers - to assess contamination control, workplace safety and lifecycle impacts.
• Standards bodies and regulatory reviewers - as a basis for interoperable technical practice in nanoelectronics manufacturing.

Related standards

• ISO/TS 80004 series (nanotechnology vocabulary and terminology) is referenced for terms and definitions; consult other IEC/IEEE nanotechnology standards for complementary guidance on measurement, testing and safety.

Keywords: IEC/IEEE 62659, nanomanufacturing, nanoelectronics, semiconductor manufacturing, nanomaterials, contamination control, high‑volume production, carbon nanotubes, graphene, quantum dots, materials characterization.