IEC TS 62607-9-1:2021

Overview - IEC TS 62607-9-1:2021 (Magnetic force microscopy, MFM)

IEC TS 62607-9-1:2021 defines a standardized, traceable method to characterize spatially varying nano‑scale stray magnetic fields for flat magnetic specimens using magnetic force microscopy (MFM). The technical specification enables calibrated, spatially resolved measurements with spatial resolution down to 10 nm, primarily detecting the stray-field component perpendicular to the sample surface. Resolution and traceability are achieved by calibrating the MFM tip against magnetically nanostructured reference materials.

Key topics and technical requirements

• Measurement principle and setup: description of MFM operation, detection of perpendicular stray field, scan discretization and measurement height control.
• Tip calibration / Instrument Calibration Function (ICF): calibration of MFM tips using calculable or band‑domain reference samples and deconvolution approaches to obtain a transfer function for traceable field reconstruction.
• Lever correction function (LCF) and distance-loss modeling to account for cantilever mechanics and tip–sample coupling.
• Regularized deconvolution: mathematical methods (pseudo‑Wiener filter, L‑curve) for stable inversion of measured signals to field maps.
• Reference samples: use of "well‑known" and band‑domain patterned specimens for tip calibration and verification.
• Uncertainty evaluation: procedures for Type A/B uncertainties, propagation through Fourier and real space, and Monte Carlo techniques to quantify measurement confidence.
• Artefact identification and mitigation: guidance on common MFM artefacts (tip/sample switching, domain distortion) and contingency strategies.
• Reporting and validation: required metadata (setup parameters, sample ID, test conditions) and validity assessment protocols.

Practical applications and users

This TS is practical for organizations that require traceable, high‑resolution magnetic characterization, including:

• Metrology and calibration laboratories establishing traceable MFM measurements.
• Nanomanufacturing and quality‑control teams working with magnetic thin films, patterned magnetic media, spintronic devices and MRAM.
• R&D groups in academia and industry performing quantitative stray field mapping at the nanoscale.
• Suppliers of MFM probes and instrument manufacturers implementing calibration procedures and software for deconvolution and uncertainty estimation.

Benefits include reproducible, comparable stray‑field maps, improved device characterization, and defensible uncertainty statements for product acceptance or research publications.

Related standards

• Other parts of the IEC 62607 Nanomanufacturing - Key control characteristics series and international magnetic metrology guidance (refer to local IEC/ISO catalogs for related documents).

Keywords: IEC TS 62607-9-1, magnetic force microscopy, MFM calibration, nano-scale stray magnetic field, traceable measurements, tip calibration, instrument calibration function, uncertainty evaluation.