ISO 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 14
- Дата публикации:
- 9 декабря 2015 г.
- Издание:
- ISO IS 14644 edition 2 version 1
- ICS:
- 13.040.35
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration. ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
Abstract
Overview
ISO 14644-2:2015 defines minimum requirements for a monitoring plan to provide evidence of cleanroom and clean zone performance related to air cleanliness by particle concentration. It specifies what to monitor, how to document and respond to results, and how monitoring supports ongoing assurance of cleanroom performance. The standard covers particle sizes from 0.1 µm to 5 µm; ultrafine particles (
Технические детали
- Технический комитет
- ISO/TC 209 - Cleanrooms and associated controlled environments
- SKU
- ISO 14644-2:2015
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