ISO 19694-7:2024

Overview

ISO 19694-7:2024 - "Stationary source emissions - Determination of greenhouse gas emissions in energy‑intensive industries - Part 7: Semiconductor and display industries" provides a standardized methodology for calculating greenhouse gas (GHG) emissions specific to the semiconductor and display sectors. The scope covers manufacture of semiconductor devices, MEMS, photovoltaic (PV) devices and displays, and supports reporting on a per‑plant, per‑company (country/region) or international group basis. The standard is harmonized with ISO 14064‑1 and ISO 19694‑1 and references the 2019 IPCC Refinement for process emission guidance.

Key topics and requirements

• Covered emission sources
  • Direct GHG emissions (owned or controlled): process emissions (fluorinated compounds - FC gases - and nitrous oxide N2O), combustion for equipment, on‑site vehicles, heating/cooling, and on‑site power generation.
  • Indirect GHG emissions from imported energy: electricity, heat, steam consumed by the organization.
  • Excludes other indirect (scope 3) emissions originating from third parties.
• Calculation approaches
  • Mass balance methods and stack emission measurement approaches are specified.
  • Multi‑tiered process emission options (Tier 1, Tier 2a/2b/2c, Tier 3a - measured parameters, Tier 3b - stack testing) allow different levels of data quality and accuracy.
• Inventory boundaries
  • Guidance on organizational and reporting boundaries to support plant, corporate and group reporting.
• Uncertainty and quality
  • Requirements for assessing measurement uncertainty, including mass balance and stack‑measurement uncertainty evaluations.
  • Monitoring plan content (informative Annex A) and default emission factors (informative Annex B) support implementation and quality assurance.

Applications and who should use it

• Intended for environmental managers, sustainability officers, GHG inventory teams, auditors, and regulators working in semiconductor fabs, display manufacturers, MEMS and PV production.
• Practical uses:
  • Preparing corporate or site‑level GHG inventories for regulatory reporting, voluntary disclosure or internal performance tracking.
  • Establishing monitoring plans, selecting measurement tiers, and applying default or measured emission factors.
  • Supporting verification and benchmarking of manufacturing process emissions (FC gases, N2O) and energy‑related indirect emissions.

Related standards

• ISO 14064‑1:2018 - GHG quantification and reporting principles.
• ISO 19694‑1:2021 - General aspects for GHG in energy‑intensive industries.
• ISO/IEC Guide 98‑3:2008 (GUM) - Uncertainty of measurement.
• 2019 Refinement to the 2006 IPCC Guidelines - referenced for process emission calculations.

Keywords: ISO 19694‑7:2024, greenhouse gas emissions, semiconductor industry, display industry, GHG inventory, fluorinated compounds, N2O, mass balance, stack measurement, emissions reporting.