ISO 3530:1979
Vacuum technology — Mass-spectrometer-type leak-detector calibration
Vacuum technology — Mass-spectrometer-type leak-detector calibration
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 10
- Дата публикации:
- 1 сентября 1979 г.
- Издание:
- ISO IS 3530 edition 1 version 1
- ICS:
- 23.160
Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
Abstract
Overview
ISO 3530:1979 - Vacuum technology - Mass-spectrometer-type leak-detector calibration - defines standardized procedures for calibrating mass‑spectrometer (MS) type leak detectors that include an integral high‑vacuum system to maintain the MS sensing element. The standard describes two primary calibration procedures:
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