EN ISO 10692-2:2001 PDF

Name: EN ISO 10692-2:2001 — Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 2: Specification and type testing for valve to cylinder connections (ISO 10692-2:2001)
SKU: EN ISO 10692-2:2001
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Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 2: Specification and type testing for valve to cylinder connections (ISO 10692-2:2001)

Название (английский):

EN ISO 10692-2:2001

Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 2: Specification and type testing for valve to cylinder connections (ISO 10692-2:2001)

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 9
Дата публикации:: 1 августа 2001 г.
Издание:: CEN EN 10692 edition 1 version 1
ICS:: 23.020.30

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Описание (английский):

Performance testing procedures for the connections for gas cylinder valves for use in ultra high purity service inlet connections.

Abstract

Похожие стандарты

Стандарты, упомянутые в описании

Overview

EN ISO 10692-2:2001 (ISO 10692-2:2001) specifies mandatory type testing and performance requirements for valve-to-cylinder connections used in the microelectronics industry where ultra-high purity gases and extremely low particulate contamination are required. It is a performance-based standard (not a dimensional system) that defines safety, leak integrity and durability checks for connections between gas cylinders and valves used in semiconductor and microelectronic manufacturing.

Key topics and technical requirements

Scope: Applies to valve-to-cylinder connections for gases and gas mixtures used where the highest cleanliness and freedom from particles are demanded.

Mandatory safety test sequence (prototype testing on a ~50 L cylinder or specified smaller size):

Fill cylinder with water and tighten connection.
200 hydraulic pressure cycles from atmospheric to test pressure (rate Δp/Δt ≤ 40 bar/min).
Impact test with protective device fitted (six pushes with 60° rotation between impacts); leak check.
Drop test per ISO 11117 after refitting protective device.
Roll/stop test: roll down 1.5 m ramp at 30° five times, repeat with reverse rotation; leak checks between steps.

Leak integrity checks: Leak testing after each step using air or nitrogen at 10 bar and leak detection fluid (1 min) or equivalent methods capable of detecting ~10 mbar·l/s; Annex B describes a helium leak test procedure for higher sensitivity used in performance testing.

Performance (recommended) tests (Annex A): include helium leak testing at 1 bar, 10 bar and 120% of working pressure; charging/emptying cycles; temperature cycling (−50 °C to +65 °C); 40 bake cycles (25 °C to 100 °C at ≤1 mbar); vibration testing (Annex C); repeated make/break cycles (20 times).

Compatibility & marking: Valves must meet ISO 10297 and ISO 11114 (parts 1–3) requirements for material compatibility and be marked accordingly.

Documentation: A detailed test report (drawings, materials, certificates) must be produced and be available from the valve manufacturer.

Applications and users

This standard is intended for:

Valve and cylinder manufacturers designing connections for ultra-high purity gas service.

Gas suppliers and semiconductor fabs specifying contamination-controlled gas delivery systems.

Test laboratories performing type approval and leak/vibration testing.

Procurement and quality engineers evaluating valve-cylinder interfaces for clean manufacturing environments.

Practical benefits include validated leak-tight, durable connections that minimize particle generation and contamination risk in microelectronics fabrication.

Related standards

ISO 10297 - Refillable gas cylinder valves - Specification and type testing

ISO 11114-1 / 11114-2 / 11114-3 - Compatibility of materials with gas contents (metallic, non‑metallic, autogenous ignition)

ISO 11117 - Valve protection caps and guards - design, construction and tests

Keywords: EN ISO 10692-2, ISO 10692-2, gas cylinder valve connections, microelectronics industry, ultra high purity gas, type testing, helium leak test, vibration test, performance testing.

EN ISO 10692-2:2001 PDF

Abstract

Похожие стандарты

Overview

Key topics and technical requirements

Applications and users

Related standards

Технические детали

ISO 10692-2:2001

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ISO 11114-1:2020/Amd 1:2023

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SIST EN ISO 10692-2:2002

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