EN ISO 25178-607:2019 PDF

Name: EN ISO 25178-607:2019 — Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instrumentss (ISO 25178-607:2018)
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Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instrumentss (ISO 25178-607:2018)

Название (английский):

EN ISO 25178-607:2019

Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instrumentss (ISO 25178-607:2018)

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 29
Дата публикации:: 10 апреля 2019 г.
Издание:: CEN EN 25178 edition 1 version 1
ICS:: 17.040.20

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Описание (английский):

This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.

Abstract

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Стандарты, упомянутые в описании

Overview

EN ISO 25178-607:2019 (ISO 25178-607:2019) is a Geometrical Product Specification (GPS) standard that defines the nominal characteristics of non‑contact confocal microscopy instruments used for areal surface texture (surface topography) measurement. The document describes the influence quantities and metrological characteristics of confocal microscope systems that produce optically sectioned areal topography images. Because surface profiles can be extracted from areal images, the standard’s guidance is also applicable to profiling measurements.

Key topics

Instrument characteristics and influence quantities: Describes the factors that affect confocal measurement performance (optical sectioning, illumination/detection geometry, scanner behavior).

Confocal measurement concepts: Definitions and explanations of terms such as axial scan, axial response, axial steps, full width at half maximum (FWHM), background offset, illumination pattern, detection pattern, and in‑plane scanning.

Metrological descriptors: Guidance for characterizing slice thickness (FWHM), maximum signal position, background offset and other signal features that influence accuracy and resolution of areal measurements.

Informative annexes: Annex A–D cover classification of in‑plane scanning techniques, theory of operation of confocal microscopes, issues with thin and thick films, and the relation to the GPS matrix model.

Non‑normative guidance: The standard contains informative material (including descriptions of patented methods) to help users understand operating principles without implying IP licensing.

Applications

Selection, specification and acceptance testing of confocal microscopy systems for surface topography metrology.

Defining measurement system capabilities for quality control in precision manufacturing (optics, microelectronics, medical devices, tribology).

Supporting traceable areal texture measurement and the extraction of surface profiles from confocal topography maps.

Informing instrument manufacturers, calibration labs and test houses about the key characteristics that affect measurement uncertainty and resolution.

Related standards

ISO 25178 series (areal surface texture standards)

ISO 25178-600 (terms and definitions for areal surface texture)

ISO 25178-602 (single‑point confocal probes - related techniques)

ISO 14638, ISO 8015 and ISO 14253-1 (GPS framework and decision rules)

Keywords: EN ISO 25178-607:2019, ISO 25178-607, confocal microscopy, areal surface texture, surface topography, axial scan, FWHM, non-contact instruments, GPS.

EN ISO 25178-607:2019 PDF

Abstract

Похожие стандарты

Overview

Key topics

Applications

Who uses this standard

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