IEC 62047-32:2019 PDF

Name: IEC 62047-32:2019 — Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators
SKU: IEC 62047-32:2019
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Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Название (английский):

IEC 62047-32:2019

Semiconductor devices - Micro-electromechanical devices - Part 32: Test method for the nonlinear vibration of MEMS resonators

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 37
Дата публикации:: 24 января 2019 г.
Издание:: IEC IS 62047 edition 1 version 1
ICS:: 29.120.99

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Описание (английский):

IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators.

Abstract

Overview

Key Topics

Nonlinear Vibration Testing The standard specifies methods to test vibration where displacement correlates nonlinearly with elastic restoring forces. This nonlinear behavior is particularly relevant at high vibration amplitudes.
Test Parameters Important parameters defined include:
- Amplitude-frequency response (Aω)
- Phase-frequency response (Pω)
- Bending factor of amplitude-frequency response (b)
- Amplitude threshold for nonlinear jump (a)
- Frequency deviations in various closed-loop systems (self-exciting, phase-locked, burst-exciting)
Test System Setup The test system typically includes a laser vibrometer, micro-optical apparatus, signal generator, vacuum chamber, mounting fixtures, vacuum pump, and angle valve. Careful alignment and environmental control such as temperature (23 ±5 °C) and vacuum levels are required for accurate measurements.
Test Procedures Procedures cover frequency scanning near the natural resonant frequency, use of vacuum chambers to minimize external damping, and focusing lasers correctly for resonator displacement detection.
Nonlinear Phenomena Concepts like nonlinear jump-where the frequency response exhibits abrupt changes at specific amplitude thresholds-are addressed through modeling and experimental procedures.

Applications

MEMS Resonator Design & Manufacturing This standard is essential for designers and manufacturers who need to evaluate the dynamic nonlinear properties of MEMS resonators. It helps optimize performance, reliability, and device lifetime.
Sensor Calibration Frequency deviation analysis in closed-loop systems is crucial for sensors relying on resonant frequency stability. Understanding nonlinear vibrational effects aids in accuracy improvement of resonant MEMS sensors.
Quality Control Implementing this test method within quality management systems ensures consistent production of MEMS resonators meeting performance specifications.
Research & Development Provides a reference for researchers working on new MEMS device concepts, especially those aiming to manage or exploit nonlinear vibration behaviors.

Related Standards

IEC 62047-1 Defines terms and definitions relevant to micro-electromechanical devices, providing foundational vocabulary for the entire IEC 62047 series.
IEC 62047 Series Covers a broad spectrum of semiconductor and MEMS device standards, providing complementary testing and specification documents for these technologies.
ISO/IEC Directives The standard is drafted according to these directives, ensuring globally accepted formatting, content structure, and procedural consistency.

Keywords: IEC 62047-32, nonlinear vibration, MEMS resonators, test method, amplitude-frequency response, phase-frequency response, bending factor, nonlinear jump, frequency deviation, semiconductor devices, micro-electromechanical systems, MEMS testing, resonator frequency stability, closed-loop system, vibration test standard.

Технические детали

Технический комитет: SC 47F - Micro-electromechanical systems
SKU: IEC 62047-32:2019

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