ISO 11039:2012 PDF
Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
Surface chemical analysis — Scanning-probe microscopy — Measurement of drift rate
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 19
- Дата публикации:
- 23 января 2012 г.
- Издание:
- ISO IS 11039 edition 1 version 1
- ICS:
- 71.040.40
ISO 11039:2012 defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates. This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.
Abstract
Overview - ISO 11039:2012 (SPM drift rate)
ISO 11039:2012 specifies how to measure and report drift rates of scanning‑probe microscopy (SPM) instruments in the X, Y (lateral) directions and, for topographic SPMs, the Z (vertical) direction. The standard defines terms (drift, drift rate, average and maximum drift rate, settling time) and gives practical, image‑based measurement methods so manufacturers and users can quote and evaluate drift figures consistently. Measurements are intended for characterization and experiment design - not for image correction.
Key topics and technical requirements
- Drift metrics: Average and maximum drift rates (X, Y, Z or vector magnitude); short‑term behaviour after a user‑defined settling time and longer‑term behaviour can both be characterized.
- Measurement methods: Three normative, image‑based procedures:
- Image correlation method (Annex A)
- Characteristic‑marker method (Annex B)
- Non‑periodic grating (NPG) method (Annex C)
- Procedure essentials: Initial checks, basic characterization to determine settling time, and further characterization under different operating conditions (Clause 6).
- Instrument requirements: Capability to record digital SPM images and maintain dimensional calibration throughout testing.
- Environmental recommendations: Controlled conditions - temperature stability within ±1 °C, relative humidity preferably
Технические детали
- Технический комитет
- ISO/TC 201/SC 9 - Scanning probe microscopy
- SKU
- ISO 11039:2012
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