Overview
ISO 13095:2014 - "Surface chemical analysis - Atomic force microscopy - Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement" defines standardized procedures to characterize the shape of AFM probes used in atomic force microscopy (AFM). The standard specifies two complementary methods to project and quantify the probe shank and approximate tip profiles onto a defined plane so users can assess probe suitability for imaging and depth measurements of nanoscale structures (for example, narrow trenches and contact holes).
Key topics and technical requirements
- Two measurement methods
- Narrow-ridge method - produces a continuous Projected Probe Profile (PPP) and the Probe Shape Characteristic (PSC) (relationship between probe profile width and length). Best for evaluating convex nanostructures (protrusions).
- Multiple-trench method - produces an Effective Probe Shape Characteristic (EPSC) at discrete points; suited for depth measurements in narrow trenches and similar profiles.
- Applicability - intended for probes whose radii exceed 5·u0, where u0 is the uncertainty of the ridge width in the chosen reference sample.
- Reference sample and alignment - requires certified or well-characterized ridge/trench reference samples; orientation of sample structures relative to AFM scanner axes must be controlled (within ~1°) to project probe shape onto the desired plane.
- Operating conditions & artifacts - highlights that imaging mode, feedback control parameters and ambient conditions (notably humidity) affect the effective probe shape; these must be recorded and considered.
- Uncertainty and reporting - specifies procedures to estimate combined standard uncertainty for probe profile length measurements and to report PPP/PSC/EPSC results for reproducible AFM imaging and metrology.
Applications and users
ISO 13095 is practical for:
- AFM instrument manufacturers and probe designers validating probe geometry.
- Calibration and metrology laboratories performing AFM probe characterization.
- Semiconductor, MEMS and nanotechnology researchers measuring nanostructure dimensions, trench depths and critical dimensions where probe convolution affects accuracy.
- Surface chemical analysis and quality-control teams requiring traceable AFM measurement procedures.
Using ISO 13095 helps ensure reproducible AFM imaging, correct interpretation of nanoscale topography, and improved confidence in depth and width measurements where probe shape strongly influences results.
Related standards
Keywords: ISO 13095, AFM probe characterization, atomic force microscopy, probe shank profile, PPP, PSC, EPSC, nanostructure measurement, reference sample, AFM imaging uncertainty.