ISO 14291:2012 PDF

Name: ISO 14291:2012 — Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
SKU: ISO 14291:2012
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Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers

Название (английский):

ISO 14291:2012

Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 14
Дата публикации:: 6 июля 2012 г.
Издание:: ISO IS 14291 edition 1 version 1
ICS:: 23.160

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Описание (английский):

ISO 14291:2012 defines terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement. ISO 14291:2012 applies to QMSs with an ion source of the electron impact ionization type. Such QMSs are designed for the measurement of atomic mass-to-charge ratios m/z typically /z above 300, which are mainly used to specify organic materials, lie outside the scope of ISO 14291:2012.

Abstract

Похожие стандарты

Упомянутые в описании и другие стандарты ISO

Overview

ISO 14291:2012 - Vacuum gauges: Definitions and specifications for quadrupole mass spectrometers (QMSs) defines terminology and the manufacturer-specified parameters needed to calibrate and maintain quality in partial‑pressure measurements using quadrupole mass spectrometers. The standard applies to QMSs that use electron‑impact ionization and are designed for typical mass‑to‑charge (m/z) ranges below 300. QMS types and ionization methods used primarily for high‑m/z organic analysis (m/z > 300) are outside its scope.

Key topics and technical requirements

ISO 14291:2012 establishes clear definitions and a baseline of manufacturer information required for reliable QMS operation and comparison:

Terms & definitions for components (sensor head, ion source, quadrupole mass filter, electronic unit) and detectors (Faraday cup, SEM, CEM, MCP).

Symbols and principles describing QMS operation and analyzers.

Manufacturer‑supplied specifications required for calibration and use, including:

Mass range and mass resolution
Type of ion source (open, closed, molecular beam) and detector (Faraday cup, SEM variants)
Sensitivity, linear response range, minimum detectable partial pressure/concentration
Mass stability, scanning parameters, signal output and potentials
Operational limits (maximum operating pressure, bake‑out temperature), warm‑up time, filament and detector details
Mechanical and electrical data: dimensions, mounting, internal volume, power, cabling, interfaces, software

Optional specifications such as fragmentation (cracking) patterns, temperature coefficients, degassing/outgassing data, and inspection records.

Practical applications and who uses this standard

ISO 14291:2012 is practical for:

QMS manufacturers - to document and declare instrument performance and calibration‑relevant parameters.

Calibration laboratories and QA teams - to establish baseline conditions and traceable partial‑pressure measurements.

Vacuum technologists and process engineers - in vacuum processing (PVD/CVD, etch), leak detection, and residual gas analysis where quantitative partial‑pressure data are required.

Research laboratories - to ensure comparability of QMS data across instruments and vendors.

Using ISO 14291 helps ensure consistent QMS specification, improves comparability between devices, and supports standardized calibration practices for reliable partial‑pressure measurement.

Related standards

ISO 3529-3:1981 (cited as a source for QMS definitions)

Developed under ISO Technical Committee ISO/TC 112 (Vacuum technology)

Keywords: ISO 14291:2012, quadrupole mass spectrometer, QMS, vacuum gauges, electron impact ionization, partial pressure measurement, residual gas analysis, calibration, Faraday cup, secondary electron multiplier.

ISO 14291:2012 PDF

Abstract

Похожие стандарты

Overview

Key topics and technical requirements

Practical applications and who uses this standard

Related standards

Технические детали

ISO 3529-3:1981

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