ISO 14706:2000 PDF
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
Surface chemical analysis — Determination of surface elemental contamination on silicon wafers by total-reflection X-ray fluorescence (TXRF) spectroscopy
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 23
- Дата публикации:
- 21 декабря 2000 г.
- Издание:
- ISO IS 14706 edition 1 version 1
- ICS:
- 71.040.40
Технические детали
- Технический комитет
- ISO/TC 201 - Surface chemical analysis
- SKU
- ISO 14706:2000
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