Name: ISO 15470:2017 — Surface chemical analysis — X-ray photoelectron spectroscopy — Description of selected instrumental performance parameters
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ISO 15470:2017 PDF — Surface chemical analysis — X-ray photoelectron spectroscopy — Descri… — GOST Standards

Scope and purpose: Describes which aspects of spectrometer performance should be documented and the agreed meaning of those items.
Method of analysis: Requires a short description of analytical methods available in the system and optional techniques integrated in the instrument.
Samples and system configuration: Specifies allowable sample size/shape and the geometric configuration and tolerances of significant components (for example, angular tolerances).
X-ray source details: Requires specification of anode type, unwanted X-ray energies and relative intensities, anode power (potential and filament emission current for each operating mode), and expected anode lifetime (guaranteed, mean historical, or graphical performance vs hours).
Intensity performance and energy resolution: Defines measurement of energy resolution using the FWHM of the Ag 3d peak from a cleaned silver foil, with peak height and FWHM reported for each operating mode. Drift over 10 min and 1 h is desirable to state.
Energy scale and calibration: Requires repeatability statistics for Cu 2p peak binding energy on re-positioned samples and binding energy error at Ag 3d when calibrated with Cu 2p and Au 4f. References ISO 15472 for calibration methodology.
Linearity and response function: Specifies maximum useful count rate and limits for count-rate linearity (example: ±2%), and requires the spectrometer response function or its energy dependence.
Imaging and lateral resolution: Defines three validated methods to measure lateral resolution (Methods 1–3), including use of isolated features, material edges, and knife-edge over a deep hole. Resolution metrics are described in terms of FWHM or 12%–88% intensity transitions.
Charge neutralization and angle-resolved XPS: Describes required reporting of neutralization methods and example effectiveness data (e.g., C 1s peaks in PET), plus provisions for sample manipulation for angle-resolved measurements.
Vacuum environment: Instrument vacuum conditions relevant to performance should be reported.

ISO 15470:2017 PDF

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