ISO 16700:2016 PDF

Name: ISO 16700:2016 — Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
SKU: ISO 16700:2016
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Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Название (английский):

ISO 16700:2016

Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 18
Дата публикации:: 18 июля 2016 г.
Издание:: ISO IS 16700 edition 2 version 1
ICS:: 37.020

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Описание (английский):

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

Abstract

Похожие стандарты

Упомянутые в описании и другие стандарты ISO

Overview

ISO 16700:2016 - Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification provides a standardized method to calibrate the image magnification of a scanning electron microscope (SEM) using an appropriate reference material (RM) or certified reference material (CRM). The method is limited by the size range (pitch patterns) available on the reference material and does not apply to dedicated critical-dimension (CD) SEMs. The standard emphasizes metrological traceability, scale markers, and reporting of calibration results and uncertainties.

Key topics and requirements

Scale marker and magnification expression

Superimpose a scale marker on SEM images and express lengths in SI units.
Magnification may be shown (e.g., 10 000×) but the scale marker is the definitive indicator for measurement.

Reference material (RM/CRM)

Prefer CRMs produced/certified per ISO Guides (where possible).
CRM requirements include stability under vacuum and electron beam, good contrast, electrical conductivity, cleanability, and a valid calibration certificate.
Pitch patterns on CRMs determine the usable magnification range.

Calibration procedures

Mounting of CRM and controlled SEM operating conditions (working distance, tilt, beam parameters).
Image recording, measurement of features on images, and calculation/adjustment of magnification and scale markers.

Accuracy and uncertainty

Evaluate accuracy (trueness) and quantify measurement uncertainty; annexes cover uncertainty estimation and influencing parameters.

Documentation

Produce a calibration report describing conditions, results, uncertainties, and traceability.

Applications

Routine SEM magnification calibration in research, quality control, materials characterization, failure analysis, and microstructure studies.

Ensuring quantitative image measurements (lengths, pitches) are traceable and accurate for standards-compliant testing.

Useful for labs preparing images for publication, certification, regulatory compliance, or cross-laboratory comparison.

Related standards

ISO Guide 30, ISO Guide 34, ISO Guide 35 (reference material production and certification)

ISO 5725-1 (accuracy)

ISO/IEC 17025 (laboratory competence)

ISO/IEC Guide 98-3 (GUM-uncertainty of measurement)

Keywords: ISO 16700:2016, SEM magnification calibration, scanning electron microscope, CRM, reference material, scale marker, calibration report, measurement uncertainty.

ISO 16700:2016 PDF

Abstract

Похожие стандарты

Overview

Key topics and requirements

Applications

Who should use this standard

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