ISO 17973:2024 PDF

Overview

ISO 17973:2024 specifies a practical method to calibrate the kinetic energy scales of medium‑resolution Auger electron spectrometers (AES) for elemental surface analysis. The standard targets routine analytical use with an energy uncertainty of 3 eV and defines procedures to establish and maintain a calibration schedule. It applies to instruments operating in direct or differential mode with resolution ≤ 0.5% and, for differential mode, a modulation amplitude of 2 eV peak‑to‑peak. Instruments must be equipped with an inert gas ion gun (or equivalent) for sample cleaning and an electron gun capable of ≥ 4 keV beam energy.

Key topics and requirements

• Calibration accuracy: Kinetic energy scale calibrated to an uncertainty of 3 eV for elemental identification.
• Reference materials: Use polycrystalline metal foils - Cu plus Au (preferred for high SNR and scans to 2 100 eV) or Cu plus Al (for lower SNR or limited scan range). Typical foils: ≥ 99.8% purity, ~10 × 10 mm, 0.1–0.2 mm thick.
• Sample preparation & mounting:
  • Clean by ion sputtering until oxygen and carbon peaks are each