ISO 18452:2005 PDF
Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer
Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 9
- Дата публикации:
- 16 ноября 2005 г.
- Издание:
- ISO IS 18452 edition 1 version 1
- ICS:
- 81.060.30
ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
Abstract
Overview
ISO 18452:2005 specifies a standardized method to determine the thickness of fine ceramic films and ceramic coatings using a contact‑probe profilometer (stylus profilometer). The method is intended for thin films in the nominal range 10 nm to 10 000 nm, requiring a clearly defined boundary between coated and uncoated substrate areas. The standard defines measurement principle, apparatus requirements, specimen preparation, test procedure, calculation method and reporting.
Key Topics and Requirements
- Measurement principle: Step‑height measurement by scanning a stylus across the coating edge and calculating the vertical difference at the inflection point of the profile.
- Measurement range: Suitable for 10–10 000 nm film thicknesses; under optimal conditions profilometers may resolve steps of only a few nanometres, though accuracy degrades at very small thicknesses.
- Apparatus:
- Contact‑probe profilometer conforming to ISO 3274.
- Diamond stylus with conical tip (vertical angles 60° or 90°) and tip radii typically 2 µm, 5 µm, 10 µm or 12.5 µm.
- Instrument calibration using step‑height calibration standards; calibration conditions should match measurement conditions.
- Test specimen & surface:
- Distinct coated/uncoated boundary required.
- Surface roughness (Ra) of substrate and coating should be ≤ 1/5 of the step height.
- Average roughness wavelength should be
Технические детали
- Технический комитет
- ISO/TC 206 - Fine ceramics
- SKU
- ISO 18452:2005
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