ISO 18516:2006 PDF
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 24
- Дата публикации:
- 19 октября 2006 г.
- Издание:
- ISO IS 18516 edition 1 version 1
- ICS:
- 71.040.40
ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm. Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.
Технические детали
- Технический комитет
- ISO/TC 201/SC 2 - General procedures
- SKU
- ISO 18516:2006
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