ISO 22278:2020 PDF

Name: ISO 22278:2020 — Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
SKU: ISO 22278:2020
Price: 25 EUR
Availability: InStock

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Название (английский):

ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 29
Дата публикации:: 24 августа 2020 г.
Издание:: ISO IS 22278 edition 1 version 1
ICS:: 81.060.30

Тип поставки:

Full version435 €Read online 24h10 €Read online 72h15 €

Язык документа:

ruen

Срок поставки:5 раб. дн. (перевод)

Цена:435 €

Описание (английский):

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

Abstract

Похожие стандарты

Другие стандарты ISO

Overview

ISO 22278:2020 defines a standardized test method for evaluating the crystalline quality of single‑crystal thin films (wafers) using the X‑ray diffraction (XRD) method with a parallel X‑ray beam. Applicable to both bulk and epitaxial layer structures, the standard provides procedures to reduce measurement variability and produce reproducible results for wide‑area wafers used in advanced ceramics and semiconductor substrates.

Key Topics

Scope and purpose: Standardizes measurement conditions and procedures for crystalline quality assessment to minimize user‑dependent errors.

Fundamentals: Principles of Bragg diffraction, rocking curves (RC) and how crystal defects (dislocations, mosaic spread, curvature, misorientation, inhomogeneity) broaden diffraction peaks.

Instrumentation and setup: Requirements and schematic configuration for XRD systems with parallel X‑ray beams, including X‑ray generator, X‑ray mirror, monochromator, slits, goniometer, detector and calibration procedures.

Sample preparation: Guidance on sample attachment, flat zone selection, and surface conditioning (e.g., CMP) to ensure accurate measurement.

Test procedures: Step‑by‑step methods for optics alignment, sample alignment, initial goniometer positioning, symmetric and asymmetric diffraction, microscopic adjustments (Φ, χ axes) and ω scans.

Measurement metrics: Use of rocking curve full width at half maximum (FWHM) as the primary indicator of crystalline quality and procedures to measure FWHM reliably.

Data analysis and reporting: Recommended analysis steps, interference considerations (wafer curvature, doped epitaxy), and required elements for the test report.

Annexes: Informative examples and interlaboratory test results to aid implementation.

Applications and Practical Value

Quality control and acceptance testing for single‑crystal substrates used in high‑power and high‑frequency devices (e.g., SiC, GaN).

Process monitoring during epitaxial growth and substrate manufacturing to detect and quantify crystal defects.

R&D and materials characterization in advanced ceramics, optoelectronics, laser host materials and piezoelectric single crystals.

Metrology labs seeking reproducible, standardized XRD rocking curve measurements for wafer benchmarking.

ISO 22278:2020 PDF

Abstract

Похожие стандарты

Overview

Key Topics

Applications and Practical Value

Who Should Use This Standard

Related Standards

Технические детали

ISO 8689-1:2000

Water quality — Biological classification of rivers — Part 1: Guidance on the interpretation of biological qu…

ISO/ASTM51540-04(2012)

Standard Practice for Use of a Radiochromic Liquid Dosimetry System (Withdrawn 2020)

ISO/ASTM51204-04

Standard Practice for Dosimetry in Gamma Irradiation Facilities for Food Processing (Withdrawn 2013)

ISO/ASTM51431-05

Standard Practice for Dosimetry in Electron Beam and X-Ray (Bremsstrahlung) Irradiation Facilities for Food P…

ISO/ASTM52628-20e1

Standard Practice for Dosimetry in Radiation Processing

ISO/ASTM52921-13(2019)

Standard Terminology for Additive Manufacturing—Coordinate Systems and Test Methodologies

ISO/ASTMTR52917-EB

Additive Manufacturing — Round Robin Testing — General Guidelines

ISO/ASTM52901-17(2023)

Standard Guide for Additive Manufacturing – General Principles – Requirements for Purchased AM Parts