ISO 23131-3:2026 PDF
Ellipsometry — Part 3: Transparent single layer model
Ellipsometry — Part 3: Transparent single layer model
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 29
- Дата публикации:
- 30 января 2026 г.
- Издание:
- ISO IS 23131 edition 1 version 1
- ICS:
- 17.020
This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
Abstract
Overview
is an international standard published by the International Organization for Standardization (ISO). It defines a method, using ellipsometric measurements and analysis, to determine the layer thickness (d) and optical properties-specifically the refractive index (n) or dielectric constant (ε₁)-of transparent single layers where the extinction coefficient (k) is zero within a given spectral region. This document is crucial for laboratories and industries where the precise measurement of transparent thin films is required, supporting high-quality material characterization and process control.
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