ISO 25178-604:2025 PDF

Name: ISO 25178-604:2025 — Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
SKU: ISO 25178-604:2025
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Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

Название (английский):

ISO 25178-604:2025

Geometrical product specifications (GPS) — Surface texture: Areal — Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 23
Дата публикации:: 14 февраля 2025 г.
Издание:: ISO IS 25178 edition 2 version 1
ICS:: 17.040.20

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Описание (английский):

This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.

Abstract

Похожие стандарты

Стандарты, упомянутые в описании

Overview

ISO 25178-604:2025 - "Geometrical product specifications (GPS) - Surface texture: Areal - Part 604" defines the design and metrological characteristics of coherence scanning interferometry (CSI) instruments used for non‑contact areal surface topography measurement. This second edition (2025) updates terminology, adds requirements for instrument design, and clarifies metrological characteristics and influence quantities. Because areal topography data can be used to extract surface profiles, the guidance is also applicable to profiling measurements.

Key topics and requirements

Instrument requirements and information flow: summarized normative features and an information‑flow concept for CSI measurement systems (Clause 4).

Metrological characteristics: definitions and characteristics relevant to repeatability, uncertainty sources and measurement performance (Clause 5, Annex B).

Design features: classification and design aspects of CSI instruments including scan mechanics and optics (Clause 6).

CSI signal fundamentals and terminology: formal definitions of CSI scan, CSI signal (correlogram), interference fringes, modulation envelope, equivalent wavelength, scan length/increment and scanning rate (Clause 3, Annex A).

Common error sources: informative treatment of influence quantities and uncertainty contributors specific to CSI (Annex B).

Relation to GPS system: placement within the ISO GPS matrix model and applicability of GPS decision rules (Introduction, Annex C).

Keywords covered naturally in this standard: ISO 25178-604:2025, coherence scanning interferometry, CSI instruments, areal surface topography, non‑contact interferometry, white light interferometry, metrological characteristics.

Practical applications and users

Who uses it:

Metrology labs and calibration facilities
Instrument designers and manufacturers of optical profilometers and white light interferometers
Quality and process engineers in precision manufacturing, optics, semiconductors and tribology research
Standards bodies and testing organizations defining acceptance criteria

Typical applications:

Non‑contact measurement of surface texture and roughness using CSI / white light interferometry
Areal topography mapping for functional surface assessment (wear, coating, sealing)
Extraction of profile data from areal measurements for legacy specifications
Instrument specification, validation and uncertainty analysis during procurement, calibration and reporting

Related standards

ISO 25178-600 (metrological characteristics for areal methods) - normative reference

ISO 25178 series (surface texture: areal) and ISO 25178-607 (related optical alignment/geometry)

ISO 10934, ISO 14638, ISO 8015, ISO 14253-1, ISO/TR 14999-2, ISO 11145 - referenced for coherence, optical and GPS principles

Use ISO 25178-604:2025 when specifying, designing, validating or procuring CSI-based areal measurement systems to ensure consistent, traceable and fit‑for‑purpose surface texture measurement.

ISO 25178-604:2025 PDF

Abstract

Похожие стандарты

Overview

Key topics and requirements

Practical applications and users

Related standards

Технические детали

SIST EN ISO 25178-600:2019

Geometrical product specifications (GPS) - Surface texture: Areal - Part 600: Metrological characteristics fo…

BS EN ISO 25178-73:2019

Geometrical product specifications (GPS). Surface texture: Areal. Terms and definitions for surface defects o…

BS EN ISO 25178-607:2019

Geometrical product specifications (GPS). Surface texture: Areal. Nominal characteristics of non-contact (con…

BS ISO 10934:2020

Microscopes. Vocabulary for light microscopy

BS EN ISO 14638:2015

Geometrical product specifications (GPS). Matrix model.

SIST EN ISO 8015:2012

Geometrical product specifications (GPS) - Fundamentals - Concepts, principles and rules (ISO 8015:2011)

SIST EN ISO 14253-1:2018

Geometrical product specifications (GPS) - Inspection by measurement of workpieces and measuring equipment -…

ISO/TR 14999-2:2005

Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 2: Measurem…