ISO 27911:2011 PDF

Name: ISO 27911:2011 — Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope
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Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope

Название (английский):

ISO 27911:2011

Surface chemical analysis — Scanning-probe microscopy — Definition and calibration of the lateral resolution of a near-field optical microscope

Статус документа:: Действующий
Формат:: Электронный (PDF)
Количество страниц:: 18
Дата публикации:: 21 июля 2011 г.
Издание:: ISO IS 27911 edition 1 version 1
ICS:: 71.040.40

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Описание (английский):

ISO 27911:2011 describes a method for determining the spatial (lateral) resolution of an apertured near-field scanning optical microscope (NSOM) by imaging an object with a size much smaller than the expected resolution. It is applicable to aperture-type NSOMs operated in the transmission, reflection, collection or illumination/collection mode.

Abstract

Похожие стандарты

Упомянутые в описании и другие стандарты ISO

Overview

ISO 27911:2011 defines a reproducible method for determining the lateral (spatial) resolution of aperture-type near-field scanning optical microscopes (NSOM / SNOM). The standard targets apertured NSOMs operated in transmission, reflection, collection or illumination/collection modes and uses the practical approach of imaging a test object much smaller than the expected resolution. ISO 27911 emphasizes use of the point spread function (PSF) concept and provides guidance suitable for non-expert operators performing resolution calibration and characterization.

Key technical topics and requirements

Scope and applicability

Applies only to apertured NSOMs (not apertureless/scattering NSOMs).
Operative in transmission, reflection, collection, or illumination/collection modes.

Measurement principle

Lateral resolution is determined by imaging a very small object and extracting the NSOM’s PSF (e.g., FWHM of the PSF).
Recognizes that NSOM PSFs can be complex (not strictly Gaussian) and depend on aperture geometry, coating and polarization.

Specimen selection and preparation

Recommends isolated nano-sized fluorescent objects on non-luminescent substrates to avoid topographic and background artefacts.
Limits topographic height of objects to one-tenth of the expected lateral resolution to reduce crosstalk between topography and optical signal.
Annex A provides examples (line-profile and quantum-dot specimens); Annex B gives specimen-preparation guidance.

Instrument and experiment parameters

Factors influencing resolution: aperture size, metal-coating condition, tip–sample gap control (shear-force or cantilever methods), signal-to-noise, pixilation, and contrast mechanism (fluorescence preferred to reduce background).
Requires documenting experimental conditions (probe type, imaging mode, specimen properties, feedback method) when reporting resolution.

Data collection, analysis and recording

Covers setting parameters prior to operation, collecting optical images, analyzing PSF/line-profiles and recording results for traceability.

Practical applications and who uses this standard

ISO 27911:2011 is valuable for:

Metrology laboratories calibrating NSOM instruments and validating lateral resolution claims.

Instrument manufacturers establishing performance specifications and QA procedures.

Research labs in nanophotonics, surface chemical analysis, materials science and semiconductor inspection using NSOM for high-resolution optical imaging.

Standards bodies and regulatory organizations needing consistent resolution measurement methods.

Benefits include improved comparability of NSOM performance data, reduced artefacts in optical imaging, and standardized reporting of lateral resolution.

ISO 27911:2011 PDF

Abstract

Похожие стандарты

Overview

Key technical topics and requirements

Practical applications and who uses this standard

Related standards and resources

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