ISO 3567:2011 PDF
Vacuum gauges — Calibration by direct comparison with a reference gauge
Vacuum gauges — Calibration by direct comparison with a reference gauge
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 14
- Дата публикации:
- 9 декабря 2011 г.
- Издание:
- ISO IS 3567 edition 1 version 1
- ICS:
- 23.160
L'ISO 3567:2011 spécifie les conditions physiques, techniques et métrologiques à remplir lors de l'étalonnage de manomètres à vide par comparaison directe avec un manomètre de référence. La conception d'un appareil pouvant effectuer des étalonnages de manomètres à vide de manière appropriée peut être déduite des conditions décrites.
Abstract
Overview
ISO 3567:2011 - "Vacuum gauges - Calibration by direct comparison with a reference gauge" defines the physical, technical and metrological conditions for calibrating vacuum gauges by exposing the unit under calibration (UUC) and a reference gauge to the same vacuum medium in a common calibration chamber. The standard supports reliable, traceable vacuum gauge calibration across a practical pressure range (from about 10 Pa to 110 kPa) and describes apparatus design, calibration procedures, uncertainty evaluation and reporting.
Key topics and technical requirements
- Calibration principle: Direct comparison in a shared calibration chamber so the UUC and reference gauge experience the same gas density and velocity distribution (not only equal pressure).
- Reference gauge: Must be traceable to a vacuum primary or national standard or be an absolute instrument; typically accompanied by a calibration certificate compliant with ISO/IEC 17025.
- Calibration chamber design:
- Volume at least 20× the combined volume of all connected gauges and plumbing.
- Preferably cylindrical or spherical with axis symmetry and equatorial placement of entrance flanges.
- Temperature uniformity: spatial temperature differences
Технические детали
- Технический комитет
- ISO/TC 112 - Vacuum technology
- SKU
- ISO 3567:2011
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