ISO 5302:2003 PDF
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 14
- Дата публикации:
- 11 июля 2003 г.
- Издание:
- ISO IS 5302 edition 1 version 1
- ICS:
- 23.160
ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.
Технические детали
- Технический комитет
- ISO/TC 112 - Vacuum technology
- SKU
- ISO 5302:2003
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