ISO/TR 14999-3:2005 PDF
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
Optics and photonics — Interferometric measurement of optical elements and optical systems — Part 3: Calibration and validation of interferometric test equipment and measurements
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 44
- Дата публикации:
- 16 марта 2005 г.
- Издание:
- ISO TR 14999 edition 1 version 1
- ICS:
- 37.020
ISO/TR 14999-3:2005 discusses sources of error and the separation of errors into symmetric and non-symmetric parts. It also describes the reliance of measurements on the quality of a physical reference surface and the development of test procedures capable of achieving absolute calibration.
Abstract
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