ISO/TR 15969:2001 PDF
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
Surface chemical analysis — Depth profiling — Measurement of sputtered depth
- Статус документа:
- Отменён
- Формат:
- Электронный (PDF)
- Количество страниц:
- 12
- Дата публикации:
- 31 мая 2001 г.
- Издание:
- ISO TR 15969 edition 1 version 1
- ICS:
- 71.040.40
This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to severalmicrometres.
Технические детали
- Технический комитет
- ISO/TC 201/SC 4 - Depth profiling
- SKU
- ISO/TR 15969:2001
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