ISO/TS 24597:2011 PDF
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
Microbeam analysis — Scanning electron microscopy — Methods of evaluating image sharpness
- Статус документа:
- Действующий
- Формат:
- Электронный (PDF)
- Количество страниц:
- 87
- Дата публикации:
- 7 июня 2011 г.
- Издание:
- ISO TS 24597 edition 1 version 1
- ICS:
- 37.020
ISO/TS 24597:2011 specifies methods of evaluating the sharpness of digitized images generated by a scanning electron microscope by means of a Fourier transform method, a contrast-to-gradient method and a derivative method.
Abstract
Overview
ISO/TS 24597:2011 provides standardized procedures for evaluating the sharpness of digitized images produced by a scanning electron microscope (SEM). It defines three objective evaluation methods - , and - and gives acquisition, data and reporting requirements to ensure consistent, repeatable measurements of SEM image sharpness.
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