Nanoscale electrical contacts and interconnects
Nanoscale electrical contacts and interconnects
1 Scope This technical report describes a variety of nanoscale contacts and nano-interconnects used in research and development and in present-day products. The intent of this technical report is to identify nanoscale contacts and nano-interconnects that will be common in products, to describe the state-of-the-art and to describe some key features and issues related to these contacts. In particular, the following are discussed in each of the nanoscale contacts or nano-interconnects discussed in Clause 5:
– type and configuration of the nanoscale contacts and interconnects formed;
– requirements of the nanoscale contacts and interconnects in products;
– fabrication technologies, processes, and process controls used to make the nanoscale contacts and interconnects;
– characterization techniques used to quantify nanoscale contacts and nano-interconnects;
– functionality and performance of nanoscale contacts and interconnects;
– reliability of the nanoscale contac...
Другие стандарты PD